Prof Hiroki Kuwano

New Industry Creation Hatchery Center (NICHe)
Tohoku University, Japan

Micro-fabricated multi focused ion beam source device using ionic liquid for sustainable design and manufacturing


Today, owing to market maturity, fabrication technologies of micro devices are gradually changing to high-mix low-volume (HMLV) manufacturing from conventional low-mix high-volume (LMHV) one based on photolithography. In HMLV manufacturing, multiple beam process using electron is a key technology for large scale of lithography.

On the other hand, focused ion beam (FIB) is only applied for analyzing and repairing. However, promising, it can offer various processes such as etching, deposition, imaging, and surface modification by controlling beam intensity and surrounding gas unlike electron beams although single focused ion beam is insufficient to productivity. From such views, we have proposed micro-multi-FIB system to increase the productivity. I will show a concept of multi focused ion beam system using ionic liquid instead of gallium liquid. Multi (5 x 5) focused ion beam array is successfully emitted from each ion source concurrently, and they can be controlled by corresponding extractors and lenses. These features enable to give us the various micro fabrication processes with high throughput.

Hiroki Kuwano


Hiroki Kuwano received his B.Eng. and M.Eng. degrees in mechanical engineering and his Ph.D. degree in electrical engineering from Tohoku University, Sendai, Japan, in 1975, 1977, and 1990, respectively. He was a Member of the Electrical Communication Laboratories of Nippon Telephone and Telegraph Public Corporation (NTT). Since 2003, he has been a Professor at Tohoku University. He has 41 years of research experience and has authored or co-authored over 110 technical papers and books in the fields of MEMS and particle beam processing. Also he has over 50 patents. His research interests are nano-energy systems, including energy-harvesting systems, and sensor networks, particularly those used for safety and medical applications, multiple focused ion beam using ionic liquid, and micro fluidics using surface acoustic wave. Prof. Kuwano was the recipient of the NTT President Award in 1993 and 1994, the Best Paper Award of The Japanese Society for Precision Engineering in 1997, Best paper Award of PowerMEMS 2010, JSME Micro-Nano Science & Technology Award for Outstanding Academic Contribution in 2017, JSME Award for a Decade of Distinguished Merit (2007 - 2016).

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